ИССЛЕДОВАНИЕ ПЛЕНОК SnO 2 , ЛЕГИРОВАННЫХ ПЕРЕХОДНЫМИ МЕТАЛЛАМИ, МЕТОДОМ РЕНТГЕНОВСКОЙ ДИФРАКЦИИ

Юлия БОРИС, Владимир БРЫНЗАРЬ, Лариса ТАРАКАНОВА, Михаил ИВАНОВ, Геннадий КОРОТЧЕНКОВ Молдавский государственный университет

Abstract

STUDY OF SnO 2 FILMS DOPED WITH TRANSITION METALS BY ROENTGEN DIFFRACTION TECHNIQUE The influence of doping of tin dioxide with metals of the transition group during deposition by spray pyrolysis on the film structure is investigated. It is demonstrated that doping is accompanied by an increase in the content of the finely dispersed or amorphous phases. The phase content can be controlled by the change in the intensity of the X-ray diffraction peaks. Keywords: thin films, deposition, crystal structure, crystallites.