SEMICONDUCTOR THIN FILMS PREPARED BY MAGNETRON SPUTTERTING (DC): THEORY vs EXPERIMENT

Igor NAROLSCHI, Alexandr CLIUCANOV, Corneliu ROTARU, Marin RUSU, Sergiu VATAVU Universitatea de Stat din Moldova

Abstract

The current-voltage dependencies of a DC magnetron system depend, as a square function, on three parameters, one of those being equal to the ignition potential in gas discharge, while the other two are being determined experimentally by use of experimental curves for low/high applied voltages. Keywords: magnetron sputtering system, current vs voltage dependence, gas discharge.