ГАЗОЧУВСТВИТЕЛЬНЫЕ СВОЙСТВА СТРУКТУРЫ СЛОЙ ХАЛЬКОГЕНИДНОГО СТЕКЛА – МЕТАЛЛ

Евгений ПОКАТИЛОВ, Денис НИКА, Надежда ЗИНЧЕНКО, Артур АСКЕРОВ, Игорь ДЕМЕНТЬЕВ, Сергей ДМИТРИЕВ, Татьяна ГОГЛИДЗЕ Лаборатория физики многослойных структур и молекулярного магнетизма

Abstract

The theory of the gas sensitivity properties of the chalcogenide glass semiconductor thin film was developed in the given paper. The dependences of the gas sensitivity on the thickness and material parameters of chalcogenide films were obtained and investigated in details. It was shown that the gas sensitivity increases with the decreasing of film thickness, charge carrier concentration and material dielectric constant.